Fluorine incorporation into porous silica by gas phase doping with C_2F_6 in N_2
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Optical Materials Express
سال: 2013
ISSN: 2159-3930
DOI: 10.1364/ome.3.001839